氮化矽素材

產品特色Product Features

產品應用Product Usage

(表格內容可透過左右拖移 )

Item / Unit				Si₃N₄
Color			-	Beige-Gray
Sape			-	Rotundity
Bulk density			g/cm3	3.25
Surface roughness			µm	<0.5
Mechanical characteristic	3-point bending strength		MPa	785
	Young's modulus		GPa	295
	Vickers hardness		GPa	15
	Fracture toughness		MPa‧m^1/2	6.5
Thermal characteristic	Coefficient of thermal expansion	40-400℃	×10-6/K	2.8
	Coefficient of thermal expansion	40-800℃	×10-6/K	3.1
	Thermal conductivity	25℃	W/(m・K)	80
	Specific heat		J/(kg・K)	680
Electric characteristic	Dielectric constant	1MHz	-	8
Electric characteristic	Volume resistivity	25℃	Ω・cm	>10¹⁴