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AlN Wafer

Wafer-Levelled AlN Substrate: AlN is a material of high insulation and heat conductivity, with which it provides a solution to electrical leakage, circuit noise, and difficulty of heat dissipation frequently seen in the interposer. Hence, the material performs well especially on the highly powered, and microminiaturized products.

1 AlN Wafer

Product Features
  • High Thermal Conductivity: 7-8 times higher than Aluminium oxide.
  • High Thermal Dissipation: improving heat-retaining.
  • CTE of AlN is close to Silicon wafer, that performs high reliability of thermo cycling  as a carrier of silicon wafers.
  • High insulation resistance and low dielectric constant that provide the solution to the electrical leakage and noise caused by the damage of insulation coating.
  • Higher mechanical strength and density compared to aluminum oxide.
  • Perform stable corrosion resistance to molten metal.
  • Non-toxic and stable components.
 
Speciality
HCAT adopts the special technology  to manufacture Wafer-levelled AlN substrates with good performance on TTV and Warp.
Application
Available for various applications such as substrates for heat dissipation, Package, thin-film circuit, power resistor, power modules (IGBT, MOSFET, and etc)
 

Speciality

(表格內容可透過左右拖移 )
PropertiesMethod OneMethod Two
SizeInches8”8”/12”
Densityg/cm^33.253.4
Surface roughness (Ra)nm-19~21
Hardness (Mohs)Mohs99
Bending strengthMpa310~350350~450
Thermal expansion(20~400℃)10^(-6)/K4.34.8
Thermal conductivity(25℃)W/(mK)180180~230
Specific heatJ/(kg*K)680720
Dielectric constant (1MHz)1MHz8.59
Dielectric loss factor (1MHz)1MHz33
Volume resistivity (25℃)Ω· cm>1014>1014
Breakdown strengthKV/mm>15>15
Warpum>100>10
TTVum-<5
Flatnessum-<3
ESD fragmentation rate%HighLow