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SiC Raw Materials

1 SiC Raw Materials

Product Features

• Low on-state resistance
• Ion resistance
• High temperature and pressure resistance
• Good thermal conductivity and stability

Application

• Equipment for Semiconductor Fabrication
• Industrial Machinery
• Spare Part with Hi-Temp Resistance and Anticorrosion

Specification

 

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碳化矽塊材規格表

(表格內容可透過左右拖移 )

Item / Unit				SiC
				Block
Thickness			µm	100 ~ 2000	100 ~ 2000	100 ~ 2000
Size			inch	Ф6"	Ф8"	Ф12"
Color			-	Carbon-black	Carbon-black	Carbon-black
Sape			-	Rotundity	Rotundity	Rotundity
Through hole			mm	-	-	-
Bulk density			g/cm3	3.2	3.2	3.2
Surface roughness			µm	-	-	-
Mechanical characteristic	3-point bending strength		MPa	400	400	400
	Young's modulus		GPa	400	400	400
	Vickers hardness		GPa	-	-	-
	Breakdown Strength		kV/mm	-	-	-
Thermal characteristic	Coefficient of thermal expansion	40-400℃	×10-6/K	3.9	3.9	3.9
		40-800℃	×10-6/K	4.3	4.3	4.3
	Thermal conductivity	25℃	W/(m・K)	130	130	130
	Specific heat		J/(kg・K)	-	-	-
Electric characteristic	Dielectric constant	1MHz	-	-	-	-
	Dielectric Loss	1MHz	×10-4	-	-	-
	Volume resistivity	25℃	Ω・cm	>3x108	>3x108	>3x108