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Si3N4 Raw Materials

1 Si₃N₄ Raw Materials

Product Features

• Low on-state resistance
• Spare Part with Hi-Temp Resistance
• Hi-Temp Resistance, Anticorrosion, and Impact resistance
• Good stability

Application

• Equipment for Semiconductor Fabrication
• Industrial Machinery
• Spare Part with Hi-Temp Resistance, Anticorrosion, and Impact resistance

Specification

 

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氮化矽塊材規格表

(表格內容可透過左右拖移 )

Item / Unit				Si3N4
Color			-	Beige-Gray
Sape			-	Rotundity
Bulk density			g/cm3	3.25
Surface roughness			µm	<0.5
Mechanical characteristic	3-point bending strength		MPa	785
	Young's modulus		GPa	295
	Vickers hardness		GPa	15
	Fracture toughness		MPa‧m1/2	6.5
Thermal characteristic	Coefficient of thermal expansion	40-400℃	×10-6/K	2.8
		40-800℃	×10-6/K	3.1
	Thermal conductivity	25℃	W/(m・K)	80
	Specific heat		J/(kg・K)	680
Electric characteristic	Dielectric constant	1MHz	-	8
	Volume resistivity	25℃	Ω・cm	>1014