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AlN Raw Materials

1 AlN Raw Materials

Product Features

• High thermal conductivity
• Non-toxic
• Good corrosion and high temperature resistance
• Thermal stability

Application

• Equipment for Semiconductor Fabrication
• Industrial Machinery
• Spare Part with Hi-Temp Resistance and Anticorrosion

Specification

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規格表

Item / Unit				AlN
				Block
Thickness			mm	2 ~ 30
Size			mm	>450
Color			-	Beige-Gray
Sape			-	Rotundity
Through hole			mm	-
Bulk density			g/cm3	3.4
Surface roughness			µm	-
Mechanical characteristic	3-point bending strength		MPa	-
	Young's modulus		GPa	-
	Vickers hardness		GPa	-
	Breakdown Strength		kV/mm	-
Thermal characteristic	Coefficient of thermal expansion	40-400℃	×10-6/K	4.8
		40-800℃	×10-6/K	5.4
	Thermal conductivity	25℃	W/(m・K)	180	200	230
	Specific heat		J/(kg・K)	720
Electric characteristic	Dielectric constant	1MHz	-	9
	Dielectric Loss	1MHz	×10-4	3
	Volume resistivity	25℃	Ω・cm	>1014